[12a-N203-1~10] 6.4 Thin films and New materials

[12a-N203-10] Soft Probe for Electric Contact to Fragile Specimens

〇Michiko Yoshitake¹ (1.NIMS)

Keywords:electric contact, elastic deformation, spring constant

A soft probe contacting with pressure in elactic reagion for electric measurements without precise force control has been developed. Ultra-thin film such as 5-layer graphene is not damaged upon contacting with this soft probe. Furthermore, the soft probe is effective for specimens having a problem of diffusion of metallic atoms deposited as an electrode such as SAM or porus materials.