The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12a-N203-1~10] 6.4 Thin films and New materials

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N203 (Oral)

Yuji Muraoka(Okayama Univ.), Hiroshi Murotani(Tokai Univ.)

11:00 AM - 11:15 AM

[12a-N203-9] Investigation of crystallization and sulfurization conditions of precursors for the deposition of highly oriented vertically aligend MoS2 thin films

〇Masato Matsushima1, Kazuki Takahashi1, Joonam Kim1,2, Mutsumi Sugiyama1,2 (1.Tokyo Univ. Sci., 2.RIST)

Keywords:MoS2, orientation, XRD