The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12a-N203-1~10] 6.4 Thin films and New materials

Sun. Sep 12, 2021 9:00 AM - 11:30 AM N203 (Oral)

Yuji Muraoka(Okayama Univ.), Hiroshi Murotani(Tokai Univ.)

9:30 AM - 9:45 AM

[12a-N203-3] Properties of Ti and TiN thin films sputtered in different gas species

〇Kazuhisa Suzuki1, Midori Kawamura1, Takayuki Kiba1, Yoshio Abe1 (1.Kitami Inst. of Tech.)

Keywords:TiN thin film, Kr gas, Plasma emission analysis