[12a-N304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12a-N304-6] Fabrication of GeOI(111) structure with Epitaxial Lift Off (ELO) technique

〇WENHSIN CHANG¹, Hsien-Wen Wan², Yi-Ting Cheng², Yen-Hsun G. Lin², Toshifumi Irisawa¹, Hiroyuki Ishii¹, Jueinai Kwo³, Minghwei Hong², Tatsuro Maeda¹ (1.AIST, 2.NTU, 3.NTHU)

Keywords:GeOI, ELO