The 82nd JSAP Autumn Meeting 2021

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8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N102 (Oral)

Kosuke Takenaka(Osaka Univ.), Hiroki Kondo(Nagoya Univ.)

1:30 PM - 1:45 PM

△ [12p-N102-1] Effect of noble gas dilution on the creation of nanoporous silver surface by localized hydrogen plasma

〇(M2)Takuro Sekido1, Takuhiro Ando1, Hiroaki Kakiuchi1, Hiromasa Ohmi1 (1.Osaka Univ.)

Keywords:nanoporous silver, hydrogen plasma, noble gas