[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-5] Ionic conductivity measurements of sputtered LiPON thin films for All-Solid-State Li ion batteries

〇Yuma Habu¹, Junki Hayashi¹, Kenta Nagai¹, Misao Kiga¹, Teruya Yamada¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)

Keywords:sputtering, solid electrolyte, Li ion Battery