Yuma Habu

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N102 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:30 PM - 2:45 PM

[12p-N102-5] Ionic conductivity measurements of sputtered LiPON thin films for All-Solid-State Li ion batteries

〇Yuma Habu¹, Junki Hayashi¹, Kenta Nagai¹, Misao Kiga¹, Teruya Yamada¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)