[12p-N102-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12p-N102-7] Fabrication of LiTiO nanostructured film by plasma sputtering and its application to the negative electrode of Li-ion batteries

〇Misao Kiga¹, Yuma Habu¹, Junki Hayashi¹, Kenta Nagai¹, Teruya Yamada¹, Giichiro Uchida^1,2 (1.Meijo Univ., 2.Ene.Inst.Meijo Univ.)

Keywords:sputtering, Li ion battery