The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[12p-N301-1~15] 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Shintaro Yasui(Tokyo Tech), Takashi Eshita(Wakayama Univ.)

4:15 PM - 4:30 PM

△ [12p-N301-11] Investigation on Mist CVD-Derived HfxZr1-xO2 Ferroelectric Thin Films Post-Deposition Annealed by Rapid Thermal Annealing

〇(M2)Yuki Fujiwara1, Hiroyuki Nishinaka1, Masahiro Yoshimoto1, Minoru Noda1 (1.Kyoto Inst. Tech.)

Keywords:hafnium zirconium oxide, mist CVD, ferroelectric