Raman spectroscopy of ferroelectric HfO<sub>2</sub>-based films

Yuma Takahashi; Takahisa Shiraishi; Masanori Kodera; Reijiro Shimura; Takanori Mimura; Hiroki Moriwake; Ayako Taguchi; Hiroshi Funakubo

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[12p-N301-1~15] 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Shintaro Yasui(Tokyo Tech), Takashi Eshita(Wakayama Univ.)

5:00 PM - 5:15 PM

[12p-N301-14] Raman spectroscopy of ferroelectric HfO₂-based films

〇(M1)Yuma Takahashi¹, Takahisa Shiraishi¹, Masanori Kodera¹, Reijiro Shimura¹, Takanori Mimura¹, Hiroki Moriwake², Ayako Taguchi², Hiroshi Funakubo¹ (1.Tokyo Tech, 2.JFCC)

Keywords:HfO2, ferroelectric, Raman spectroscopy

« Previous in this session
Next in this session »

▲

Presentation information

[12p-N301-1~15] 6.1 Ferroelectric thin films

[12p-N301-14] Raman spectroscopy of ferroelectric HfO2-based films

[12p-N301-14] Raman spectroscopy of ferroelectric HfO₂-based films