[13a-N321-1~10] 3.11 Photonic structures and phenomena

[13a-N321-3] Fabrication of GaN microdisk resonators by laser-assisted photo-electrochemical etching and their optical characterization

〇Kenshin Shimoyoshi¹, Shun Ukita¹, Kazuo Uchida¹, Takeyoshi Tajiri¹ (1.Dentsu Univ.)

Keywords:microdisk, photo-electrochemical etching