4:00 PM - 4:15 PM
[13p-N101-12] Characterizations of microstructures in AlN hetero-epitaxial films grown by ammonia-free high-temperature MOVPE
Keywords:AlN
We proposed a new growth technique, named ammonia-free high-temperature MOVPE, for the AlN growth. In this conference, we report the characterization results of microstructures in AlN hetero-epitaxial films grown by this technique.