The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

1:15 PM - 1:30 PM

[13p-S301-2] Fabrication and structural analysis of a-SiCNx:H films from the decomposition of organosilicon compound induced by the microwave plasma of N2

〇Tsubasa Takai1, Haruhiko Ito1, Tsuneo Suzuki1 (1.Nagaoka Univ. of Tech)

Keywords:Plasma CVD, Hydrogenated amorphous silicon carbide