Solid-phase crystallization of Ga<sub>2</sub>O<sub>3</sub> thin films on polymers by excimer laser annealing

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Wed. Sep 22, 2021 9:00 AM - 10:40 AM P04 (Poster)

9:00 AM - 10:40 AM

〇(M1)Ryoya Kai¹, Kazuki Watanabe¹, Tomoaki Oga¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)

Keywords:gallium oxide, polymer substrate, excimer laser annealing