[23a-P06-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

▲ [23a-P06-3] Application of Millisecond Solid Phase Crystallization of Silicon Films Induced by Micro-Thermal-Plasma-Jet to Bottom-Gate Thin-Film Transistors

〇(DC)Nguyen ThiKhanh Hoa¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

Keywords:millisecond solid phase crystallization, bottom gate thin film transistor, silicon film