[23p-P12-1~11] 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)

[23p-P12-4] Fabrication of ZnO nanoparticle dispersed ZnMgO thin films by mist CVD

〇Toshihiro Nara¹, Shougo Onoda¹, Tsukasa Yagasaki¹, Kyousuke Tanaka¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara¹ (1.Shizuoka Univ.)

Keywords:mist CVD, zinc oxide, nanoparticles