Ryo Hirose

→ Search for Ryo Hirose in Google Scholar

Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z29 (Z29)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19a-Z29-1~9] 15.7 Crystal characterization, impurities and crystal defects

9:30 AM - 9:45 AM

△ [19a-Z29-3] Characteristic of Molecular Ion Implanted Epitaxial Silicon Wafers for 3D-Stacked CMOS Image Sensors (Ⅲ)
-Gettering Capability in Hybrid Molecular Ion Implanted Range-

〇Ryo Hirose¹, Takeshi Kadono¹, Ayumi Masada¹, Ryosuke Okuyama¹, Koji Kobayashi¹, Akihiro Suzuki¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)