Ryosuke Okuyama

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z29 (Z29)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19a-Z29-1~9] 15.7 Crystal characterization, impurities and crystal defects

9:00 AM - 9:15 AM

[19a-Z29-1] Characteristic of Molecular Ion Implanted Epitaxial Silicon Wafers for 3D-Stacked CMOS Image Sensors (I)
-Reduction of SiO₂/Si Interface State using Hydrocarbon-Molecular-Ion-Implanted Wafers-

〇Ryosuke Okuyama¹, Takeshi Kadono¹, Ayumi Masada¹, Akihiro Suzuki¹, Koji Kobayashi¹, Satoshi Shigematsu¹, Ryo Hirose¹, Yoshihiro Koga¹, Kazunari Kurita¹ (1.SUMCO)