Shuhei Nakamichi

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:45 AM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

[19a-Z24-6] Study of Coating Process for Various Photo-resists using Minimal Fab Coater

〇Shuhei Nakamichi¹, Hiroyuki Tanaka², Fumito Imura², Shuichi Noda², Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)