TsungEn Lee

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 9:00 AM - 12:15 PM Z13 (Z13)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-Z13-1~12] 13.3 Insulator technology

10:15 AM - 10:30 AM

▲ [16a-Z13-6] Characterization of slow traps in MOS interfaces of TiN/Y₂O₃/SiGe gate stacks

〇(D)TsungEn Lee, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo)