Machiko Ito

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 1:30 PM - 4:15 PM Z25 (Z25)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-Z25-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:00 PM - 2:15 PM

[16p-Z25-3] Practical Study on Improving AFM-IR Spatial Resolution for Development of LSI Device.

〇Machiko Ito¹, Yuji Yamada¹, Fuminori Ito¹ (1.Kioxia Corporation)