13:30 〜 13:45 [16p-Z26-1] [講演奨励賞受賞記念講演] Reliability characteristics of Ferroelectric-HfO2 capacitor with IGZO capping for non-volatile memory application 〇莫 非1、更屋 拓哉1、平本 俊郎1、小林 正治1 (1.東大生産研)