Iori Hirashima

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:00 AM - 11:15 AM

[17a-Z03-9] Lateral Etching of Aluminum Thin Film Deposited on Glass Substrate using Atmospheric-Pressure Plasma Jet (II)

〇Iori Hirashima¹, Hiroshi Kuwahata¹ (1.Toukai Univ.)