Tetsuyuki Matsumoto

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Speaker, Author, Co-Author

Wed. Mar 17, 2021 9:00 AM - 12:00 PM Z04 (Z04)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.1 Interdisciplinary and General Physics

[17a-Z04-1~11] 1.1 Interdisciplinary and General Physics

9:45 AM - 10:00 AM

[17a-Z04-4] Influence of Grain Size and Elemental Composition to Plasma Resistance
in Reactive Ion Etching

〇Tetsuyuki Matsumoto^2,1, Tetsuya Homma² (1.Kioxia, 2.Shibaura-it)

10:00 AM - 10:15 AM

[17a-Z04-5] Study on Cleaning Method used for Recycling SiC Focus Ring

〇Tetsuyuki Matsumoto^2,1, Tetsuya Homma² (1.Kioxia, 2.Shibaura-it)