Yoshiyuki Honda

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[18a-Z14-1~11] 7.1 X-ray technologies

9:00 AM - 9:15 AM

△ [18a-Z14-1] Surface deterioration control in protective film of collector mirror for EUV light source

〇Yoshiyuki Honda¹, Shinji Nagai¹, Masayuki Morita¹, Masahiko Andou¹, Akifumi Matsuda², Mamoru Yoshimoto² (1.Gigaphoton Inc., 2.Tokyo Tech.)