Tomoaki Nishimura

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:15 AM - 12:00 PM Z15 (Z15)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[18a-Z15-1~10] 13.7 Compound and power electron devices and process technology

9:45 AM - 10:00 AM

[18a-Z15-3] Implantation of Mg ion into GaN substrate on a channeling condition (IV)

〇Tomoaki Nishimura¹, Kiyoji Ikeda¹, Tetsu Kachi² (1.Hosei Univ., 2.Nagoya Univ.)