Tatsuki Sugihara

→ Search for Tatsuki Sugihara in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

9:15 AM - 9:30 AM

[18a-Z16-2] Advantages of 150 kV electron beam lithography for thick resist

〇Tatsuki Sugihara^1,2, Arata Kaneko¹ (1.Tokyo Metro. Univ., 2.ELIONIX Inc.)