Tomoaki Osumi

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 11:15 AM Z16 (Z16)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[18a-Z16-1~8] 7.3 Micro/Nano patterning and fabrication

10:45 AM - 11:00 AM

[18a-Z16-7] Optimization of BILM for 3-dimensional photolithography

〇(B)Tomoaki Osumi¹, Masaaki Yasuda¹, Masaru Sasago¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)