Yoshiaki Watanabe

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

4:00 PM - 4:15 PM

[18p-Z17-10] Measurement of Influence of Input Power on Fundamental Properties of Tetramethylsilane Plasmas for Deposition of Si-containing DLC Films

〇Yoshiaki Watanabe¹, Shun Suzuki², Koichi Ishii², Akinori Oda², Takayuki Ohta³, Hiroyuki Kousaka⁴ (1.Innovation Science, 2.Chiba Inst. Technol., 3.Meijo Univ., 4.Gifu Univ.)

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