Yuki Nakagomi

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 7:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[18p-Z17-1~20] 8.1 Plasma production and diagnostics

5:00 PM - 5:15 PM

[18p-Z17-14] Ion composition analysis of Deep Oscillation Magnetron Sputtering (DOMS) using a reflectron time-of-flight mass spectrometer

〇Yuki Nakagomi¹, Hiroshi Nishida¹, Nobuo Nishimiya¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Naoyuki Hirata², Masahide Tona², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytechinic Univ., 2.Ayabo Corp, 3.Toyota Phys. & Chem. Res. Inst., 4.Tohoku Univ.)

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