Kohshi Taguchi

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM

[18a-Z17-1] Structural change of the polyimide plasma-polymer due to different plasma gases

〇Kohshi Taguchi¹, Ko Minoura¹, Motohiro Yamahara¹, Kazuyuki Noborio¹ (1.Sakigake semiconductor Co., Ltd.)

Thu. Mar 18, 2021 1:30 PM - 5:45 PM Z18 (Z18)

Oral presentation
| 8 Plasma Electronics
| 8.5 Plasma phenomena, emerging area of plasmas and their new applications

[18p-Z18-1~16] 8.5 Plasma phenomena, emerging area of plasmas and their new applications

4:45 PM - 5:00 PM

[18p-Z18-13] Voltage-dependent structural change of powder generated by atmospheric pressure

〇Kohshi Taguchi¹, Momoyo Takahashi¹, Motohiro Yamahara¹, Kazuyuki Noborio¹ (1.Sakigake semiconductor Co., Ltd.)