Shun Sasaki

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Speaker, Author, Co-Author

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z29 (Z29)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19a-Z29-1~9] 15.7 Crystal characterization, impurities and crystal defects

10:30 AM - 10:45 AM

[19a-Z29-6] Influence for Power Semiconductor Device Properties of Carbon Related Crystal Defect
in Silicon Wafer

〇Shun Sasaki¹, Noritomo Mitsugi¹, Shuichi Samata¹, Masanori Tsukuda², Ichiro Omura² (1.SUMCO Corporation, 2.Kyushu Inst)