[16p-Z12-1~17] 8.8 プラズマエレクトロニクス分科会30周年記念特別セッション

▲ [16p-Z12-7] Validation of PIC/MCC simulation coupled with CRM for capacitively-coupled Ar plasma by OES measurements

〇(M2)FatimaJenina Tolentino Arellano¹、Zoltan Donko^1,2、Peter Hartmann²、Tsanko Tsankov³、Uwe Czarnetzki³、Satoshi Hamaguchi¹ (1.Osaka University、2.Wigner Research for Physics, Budapest、3.Ruhr University Bochum)

キーワード：capacitively-coupled plasma, particle-in-cell, collisional radiative model

One-dimensional (1D) Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations [1] coupled with a Collisional Radiative Model (CRM) [2] for capacitively-coupled Ar plasmas were performed and the predicted OES spectra were compared to those obtained from symmetric discharge experiments. The CRM for the first 14 levels of argon used in this study can incorporate an arbitrary electron energy distribution function. The predicted OES intensities based on the electron density and electron energy distributions obtained from PIC/MCC simulations may offer a relatively easy means to validate the PIC/MCC simulation, in the absence of more elaborate diagnostics such as probe measurements or active optical measurements such as Thomson scattering. The experiments were performed in a plasma source with symmetric parallel-plate metal electrodes having a gap distance of 4 cm and enclosed inside a cylindrical quartz chamber wall. The electrode radius was 7.1 cm. The applied peak-to-peak radio-frequency (RF) voltage between the electrodes and the gas pressure were in the ranges of 200 – 500 V and 5 - 120 Pa respectively. The RF frequency was 13.56 MHz. The OES in the experiment was acquired from the central (~1cm-wide) bulk region of the plasma. The measured current was also compared with the PIC/MCC simulation results. Comparison of the line intensity ratios (normalized at the Ar 794.8 nm line) predicted by the simulation and measured from experimental observations for an Ar discharge were found to be in good agreement.