[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-6] Desorbed product measurements and analyses of the reaction mechanisms for atomic layer etching (ALE) of transition metals by beta-diketon exposure

〇Tomoko Ito¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)

Keywords:transition metal, Atomic Layer Etching