The 68th JSAP Spring Meeting 2021

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-Z15-1~7] 6.2 Carbon-based thin films

Wed. Mar 17, 2021 10:00 AM - 11:45 AM Z15 (Z15)

Hiroki Akasaka(Tokyo Tech)

10:30 AM - 10:45 AM

[17a-Z15-3] Optical constants of DLC films formed by GCIB-assisted deposition

〇Reimi Miyamoto1, Akio Nishiyama2, Ryota Yoshikawa2, Junji Taguchi2, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.Nomura Plating Co., Ltd.)

Keywords:GCIB-assisted deposition, DLC films, Optical constants