[17a-Z15-1~7] 6.2 Carbon-based thin films

[17a-Z15-4] Fabrication of Hydrogen-Free DLC Films Using RF Plasma CVD Method with He/CO Mixied Gas

〇Toru Harigai¹, Hikaru Ohhra¹, Ryoya Tominaga¹, Hirofumi Takikawa¹, Kohtaku Suzuki², Shinsuke Kunitsugu³ (1.Toyohashi Univ. Technol., 2.Wakasa Wan Energy Res. Cent., 3.Ind. Technol. Cent. Okayama Pref.)

Keywords:diamond-like carbon, amorphous carbon