9:00 AM - 9:15 AM
[18a-Z16-1] Research on Stereophonic Projection Exposure Using Faced Parabolic Mirrors and a Transparent Original Object
Keywords:lithography, parabolic mirror, projection exposure
A new stereophonic lithography method using a pair of parabolic mirrors as projection optics was proposed in the past research. An original object with reflection patterns was placed at the aperture center of the bottom mirror, and it was projected at the aperture center of the upper mirror by illuminating the original object by the upward oblique light rays from the bottom. Utilizing the projected pattern images, it was expected that stereophonic lithography is feasible. However, it was found difficult to illuminate flat top surfaces or concave surfaces by the upward oblique light rays, and image contrasts of such parts were degraded. For this reason, projection scheme applying transparent original objects instead was newly tried. Utilizing film reticles, it was demonstrated that stereophonic projection was practicable, and flat projection fields were slightly distorted in spool shapes.