The 68th JSAP Spring Meeting 2021

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8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)

9:00 AM - 9:15 AM

[18a-Z17-1] Structural change of the polyimide plasma-polymer due to different plasma gases

〇Kohshi Taguchi1, Ko Minoura1, Motohiro Yamahara1, Kazuyuki Noborio1 (1.Sakigake semiconductor Co., Ltd.)

Keywords:plasma-polymer, polyimide