10:45 AM - 11:00 AM
[18a-Z27-7] Fabrication of AlGaN films by sputtering deposition and face-to-face annealing
Keywords:Nitride semiconductor
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Thu. Mar 18, 2021 9:00 AM - 11:30 AM Z27 (Z27)
Tsutomu Araki(Ritsumeikan Univ.), Atsushi Kobayashi(Univ. of Tokyo)
10:45 AM - 11:00 AM
Keywords:Nitride semiconductor