The 68th JSAP Spring Meeting 2021

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Symposium (Oral)

Symposium » Progresses and future on EUV and soft x-ray imaging techniques

[18p-Z03-1~10] Progresses and future on EUV and soft x-ray imaging techniques

Thu. Mar 18, 2021 2:30 PM - 6:35 PM Z03 (Z03)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Toshihide Tsuru(Yamagata Univ.), Tetsuo Harada(Univ. of Hyogo), Ohigashi Takuji(IMS)

5:20 PM - 5:35 PM

[18p-Z03-8] Lab-scale EUV Microscope for Stain-Free Visualization of Higher-Order Structures on Polymer Materials

〇Mitsunori Toyoda1,2, Yukifumi Momono2, Toshiyuki Kakudate2, Jun Chen1 (1.Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)

Keywords:EUV imaging