The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[18p-Z05-1~16] 15.6 Group IV Compound Semiconductors (SiC)

Thu. Mar 18, 2021 1:30 PM - 6:00 PM Z05 (Z05)

Takuji Hosoi(Osaka Univ.), Wakana Takeuchi(Aichi Inst. of Tech.), Hirohisa Hirai(AIST)

2:45 PM - 3:00 PM

△ [18p-Z05-6] Body bias dependence of the effective channel mobility in SiC MOSFETs with phosphorus treatment

〇(D)Koji Ito1, Masahiro Horita1,2, Jun Suda1,2, Tsunenobu Kimoto1 (1.Kyoto Univ., 2.Nagoya Univ.)

Keywords:SiC, MOS, MOSFET