Epitaxial growth of high Mg composition Ni<sub>1-x</sub>Mg<sub>x</sub>O thin film by mist CVD

Yihua Sun; Takumi Ikenoue; Masao Miyake; Tetsuji Hirato

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-Z33-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Thu. Mar 18, 2021 1:00 PM - 6:00 PM Z33 (Z33)

Tetsuya Yamamoto(Kochi Univ. of Tech.), Keisuke Ide(Tokyo Tech), Kohei SHIMA(Tohoku Univ.)

5:00 PM - 5:15 PM

[18p-Z33-14] Epitaxial growth of high Mg composition Ni_1-xMg_xO thin film by mist CVD

〇(M1)Yihua Sun¹, Takumi Ikenoue¹, Masao Miyake¹, Tetsuji Hirato¹ (1.Kyoto Univ.)

Keywords:Mist CVD, NiMgO

« Previous in this session
Next in this session »

▲

Presentation information

[18p-Z33-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-Z33-14] Epitaxial growth of high Mg composition Ni1-xMgxO thin film by mist CVD

[18p-Z33-14] Epitaxial growth of high Mg composition Ni_1-xMg_xO thin film by mist CVD