[19a-Z13-1~8] 6.1 Ferroelectric thin films

△ [19a-Z13-8] Enhancement of electromechanical coupling coefficient k_t² of ZnO thin film BAW resonators by Mg or Ca doping in the UHF frequency ranges

〇Kota Izumi^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST-CREST)

Keywords:piezoelectricity, phase transition

GHz electromechanical coupling coefficient k_t² of MgZnO and CaZnO thin films have not been reported. In this study, the relationship between k_t² and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity V_L of the MgZnO films was estimated.