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[19a-Z33-5] Fragile (010) surface of β-Ga2O3
Keywords:Ga2O3, cleavage, Vickers hardness
In β-Ga2O3 (010)-oriented substrate, machined processes induce significant damage compared with in the (-201) and (001)-oriented ones. In this study, mechanical fragility was examined by using Vickers hardness (HV) measurements. Compared with the (-201) and (001)-oriented substrates, the (010)-oriented substrate exhibited smaller HV value and large cracks due to the (100) and (001) cleavages around the indentation.