The 68th JSAP Spring Meeting 2021

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[19p-Z27-1~14] 15.4 III-V-group nitride crystals

Fri. Mar 19, 2021 1:00 PM - 5:00 PM Z27 (Z27)

Hiroto Sekiguchi(Toyohashi Univ. of Tech.), Momoko Deura(Univ. of Tokyo), Kenjiro Uesugi(Mie Univ.)

2:45 PM - 3:00 PM

[19p-Z27-7] MOVPE Growth of AlGaN Channel HEMTs on Annealed Sputtered AlN Templates

〇(M1)Ryuichi Mori1, Kenjiro Uesugi2, Tatsuya Shirato1, Shigeyuki Kuboya2, Kanako Shojiki1, Hideto Miyake1,3 (1.Grad. Sch. of Eng., Mie Univ., 2.SPORR, Mie Univ., 3.Grad. Sch. of RIS., Mie Univ.)

Keywords:Nitride Semiconductor, High Electron Mobility Transistor