2:45 PM - 3:00 PM
△ [19p-Z33-6] Crystallinity and electrical properties of SPC-In2O3:H for thin-film transistors
Keywords:oxide semiconductor, solid faze crystallization, thin film transistor
Oral presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Fri. Mar 19, 2021 1:30 PM - 6:00 PM Z33 (Z33)
Yasuaki Ishikawa(Aoyama Gakuin Univ.), Kohei Fujiwara(Tohoku Univ.), Akifumi Matsuda(Tokyo Tech)
2:45 PM - 3:00 PM
Keywords:oxide semiconductor, solid faze crystallization, thin film transistor