2:30 PM - 2:45 PM
△ [19p-Z33-5] Thermal stability of resistance of ion-implanted amorphous-InGaZnO film
Keywords:InGaZnO, ion implantation, thermal stability
Oral presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Fri. Mar 19, 2021 1:30 PM - 6:00 PM Z33 (Z33)
Yasuaki Ishikawa(Aoyama Gakuin Univ.), Kohei Fujiwara(Tohoku Univ.), Akifumi Matsuda(Tokyo Tech)
2:30 PM - 2:45 PM
Keywords:InGaZnO, ion implantation, thermal stability