Hiroiki Hayakawa

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

[20a-A406-4] Physical mechanism for Palladium induced crystallization of amorphous-Silicon

〇Hiroiki Hayakawa¹, Ken Hoshino¹, Yusuke Mori¹, Takamitsu Ochi¹, Keiki Nagai¹, Makoto Fujiwara¹ (1.KIOXIA)