Yuji Ando

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Speaker, Author, Co-Author

Fri. Sep 23, 2022 9:00 AM - 12:00 PM B204 (B204)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power devices, process technology and characterization

[23a-B204-1~11] 13.7 Compound and power devices, process technology and characterization

9:15 AM - 9:30 AM

[23a-B204-2] Fabrication of a 150 nm Class Y-Shaped Gate AlGaN/GaN HEMT Using i-Line Stepper

〇Yuji Ando^1,2, Hidemasa Takahashi¹, Ryutaro Makisako¹, Akio Wakejima³, Jun Suda^1,2 (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.Nagoya Inst. Tech.)