kazushige sato

→ Search for kazushige sato in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:00 PM - 4:30 PM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-A406-1~13] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM

[20p-A406-3] Monitoring CV characteristics in Minimal Fab for manufacturing process control

〇kazushige sato¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST)